Sensors Based on Nanoscale Silicon 1D Structures for Industrial, Environmental and Medical Monitoring

Article is devoted to the analysis of modern sensors based on silicon nanowires (SiNWs) determine influence SiNWs synthesis parameters and their structural features device characteristics. A trend in development electronic sensing devices use various types nanomaterials order increase sensor sensitivity miniaturize size. 1D nanomaterials, namely SiNWs, have several advantages for applications, such as a large surface-to-volume ratio an increased rate diffusion main charge carriers. Based literature analysis, overview was made. The structures were shown by comparison with other nanostructures. Also classified according methods principle operation, kind input value applied modifiers. Silicon most often synthesized method metal-stimulated chemical etching, which include simplicity implementation, low cost, ability synthesize nanostructures high aspect ratio. vapor-liquid-solid also used, be adapted any technology supplying gas mixture target component possibility obtaining diameter 10 nm or less. According developed basis are electrical type (resistive, capacitive, electrochemical, diode transistor type), optical (fluorescent) much lesser extent. Gas (ethanol, oil vapor, formaldehyde, ammonia, nitrogen oxide, hydrogen, carbon dioxide,), liquid (glucose, hydrogen peroxide, ethanol, heavy metal ions, pH), physical values (humidity, temperature illumination) been nanoscale structures. following surface modifiers used improve performance characteristics: noble nanoparticles, metal-organic framework structures, nanotubes, graphene, self-assembled monolayers, oxide thin films. In particular, it that modification array metals led 80%. Modification formaldehyde using reduced graphene resulted improvement more than 2 times. characteristics determined. increasing width from 20–30 500–600 humidity 4.5 7.5%. Increasing etching time caused longer nanowires, improved dioxide 0.6 2.5%. Dependences established this work will make possible develop production sensitivity, selectivity, stability operation speed.